| 产品特性：VHF | 适用产品：PECVD刻蚀 | 输入电压范围：0-1000 |
| 输出电压：200 |
Power Spec: 7.5kW for CW / 10kWpeak for Pulse
2 | RF Frequency | 60MHz | 60MHz |
| 3 | Default Regulation Mode | CW (non-pulsed) mode | |
| 4 | Load VSWR at Any Phase | Up to 1.1:1 | |
| 5 | AC Line Voltage and Frequency | 208 VAC Nominal, 60Hz | |
| 6 | RF Frequency Range | 57 - 63MHz | |
| 7 | RF Frequency stability | <+/-0.005% | |
| 8 | Output Impedance | 50惟 | |
| 9 | Dynamic Range(CW) | 100 to 7500W | 100 to 7500W |
| 10 | Setpoint Range(CW) | 0 to 7500W | 0 to 7500W |
| 11 | Zero Setpoint(CW) | 鈮�3W Output or Read-Back Power | |
| 12 | Dynamic Range(Pulse) | 100 to 10000W | 100 to 10000W |
| 13 | Setpoint Range(Pulse) | 0 to 10000W | 0W to 10000W |
| 14 | Zero Setpoint(Pulse) | 鈮�3W | |
| 15 | Rise Time(CW) | <150ms (0-1500W) | |
| 16 | Settling time(CW) | <50ms | |
| 17 | Fall time(CW) | <20ms | |
| 18 | Overshoot(CW, 50 Ohm) | <2% | |
| 19 | Overshoot( Open and Short and Plasma Ignition ) | <10% | |
| 20 | RF On Response Time | <100ms |
